DIN 50447:1995
半導(dǎo)體工藝材料的檢驗.用渦流法無接點測量半導(dǎo)體層的表面電阻
Testing of materials for semiconductor technology - Contactless determination of the electrical sheet resistance of semiconductor layers with the eddy-current method
- 標(biāo)準(zhǔn)號
- DIN 50447:1995
- 發(fā)布
- 1995年
- 發(fā)布單位
- 德國標(biāo)準(zhǔn)化學(xué)會
- 當(dāng)前最新
- DIN 50447:1995